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반도체 제조장비

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Wafer Mounter

Specifications
Model name

NWMS-3000

Specification

Applicable Wafer size : 8"/12"

Applicable Tape Type : Normal/UV/Pre-cut Tape

Mounting Accuracy : ±0.5mm

Wafer Chuck : Non-contact Wafer Mounter (Air Floating)

SPH : 40 - 50 frame/hr

Loading type : FOUP to Cassette Magazine

Press : Hydraulic Press

Tool Type : Quick Changeable Modular type

System Controller : PLC or PC with Touch Screen

Power Supply : 220VAC, 1 Phase or 380VAC, 3 Phase, 50/60Hz

Air Supply : 5~6kgs/㎠

Machine Dimension (LxWxH) : 2,000mm x 1,800mm x 1,850mm